deep trench isolation process
由ZKuiying著作·2010·被引用5次—Adeeptrenchisolationprocessprovidesverylowleakagecurrent,low...Accordingtotheoptimizedtrenchprocess,desirableisolationcapabilityofthedeep ...,ThetrenchisolationregionsisolateeachpairofCMOStransistorsandanylinearorhig...
A Shallow and Deep Trench Isolation Process Module for ...
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由MForsberg著作·2004·被引用4次—Ashallowanddeeptrenchisolationprocessmoduleforhighperformancerfbipolarcomplementarymetal-oxide-semiconductor.(BiCMOS)ispresentedindetail.
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